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May 05, 2024
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2012-2013 Graduate Catalog [ARCHIVED CATALOG]
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ECE 464 - Microelectronics Science and Engineering
The science and engineering of CMOS and deep sub-micron semiconductor device fabrication. Semiconductor process steps including: diffusion, oxidation, reactive ion etching, chemical etching, surface cleaning, lithography, ion implantation, thin film deposition and chemical-mechanical polishing. A CMOS process flow is outlined. Computer simulation is utilized to provide insight into ion implantation, diffusion and lithography. Lec 3 (Spring.)
Prerequisites & Notes
CHY 121, PHY 122.
Credits: 3
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Graduate School